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Open Access Article

Physical Sience and Technical Research. 2024; 4: (1) ; 17-23 ; DOI: 10.12208/j.pstr.20240003.

Desktop cluster beam source with high atomic precise mass resolution
高原子质量分辨率的桌面级纳米团簇源

作者: 辛骅1, 杜启帆1, 白伟1, 韩玉冰2, 王佳2, 刘红宇2, 殷浩华2, 陆大春2 *

1 陕西科技大学机电工程学院 陕西西安

2 扩维原子有限公司,广东省深圳市鸿创科技中心 广东深圳

*通讯作者: 陆大春,单位: 扩维原子有限公司,广东省深圳市鸿创科技中心 广东深圳;

发布时间: 2024-06-28 总浏览量: 75

摘要

本文报告了一种基于磁控溅射、气体冷凝、离子光学和质量选择组合的桌面级纳米团簇制备源,该源能够精确控制纳米团簇的原子数。磁控溅射技术用于气化靶材,可适用于周期表中的65种以上元素,同时也兼容合金和化合物。纳米团簇在液氮冷却环境下,通过氩气和氦气的冷凝作用形成。该团簇源结合离子光学系统和改进的横向多振荡飞行时间质谱仪,能够制备出尺寸范围从2个原子到不少10万个原子的纳米团簇,且保持恒定的质量分辨率(M/dM>30)。通过优化,离子光学系统和质谱仪的尺寸显著减小,使得团簇束源从大型综合设备转变为桌面级紧凑装置,大大降低了制造成本。

关键词: 磁控溅射;气体冷凝;离子光学;质量选择

Abstract

We report on a desktop source for producing atomic number precise nanocluster based on the combination of magnetron sputtering, gas condensation, ion optics and mass filter. The use of magnetron sputtering to vaporize a target is applicable to more than 65 elements in the periodic table, also compatible with alloys and compounds. Nanoclusters are formed by condensation with Ar and He gases in a liquid nitrogen cooling environment. The source, combined with ion optics and a modified lateral multi-oscillating time-of-flight mass filter, can produce nanoclusters in the size range from 2 up to at least 100,000 atoms with a constant mass resolution (M/dM>30). By optimizing the dimensions of the ion optics and mass filter, the cluster beam source has been significantly downsized, transforming it from a large, comprehensive piece of equipment to a compact desktop device, thereby significantly reducing manufacturing costs.

Key words: Magnetron sputtering; Gas condensation; Ion optics; Quality selection

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引用本文

辛骅, 杜启帆, 白伟, 韩玉冰, 王佳, 刘红宇, 殷浩华, 陆大春, 高原子质量分辨率的桌面级纳米团簇源[J]. 物理科学与技术研究, 2024; 4: (1) : 17-23.